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WUD-20-E 1
WUD-20-E
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WIKA · Pressure measurement · Family WUD

Ultra high purity transducer

Ultra high purity transducer with display and EtherCAT for high-accuracy pressure measurement in semiconductor industry
Range
-14.5…5000 psi
Output
EtherCAT · EtherCAT®
Accuracy
0.3 % of span
Protection
IP20
RoHSCEPressure Equipment DirectiveEMC Directive EN 61326
Price
On request
Depends on configuration
Request a quote
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Description

The WUD-2x-E model is a particularly compact, ultra high purity transducer for high-accuracy pressure measurement of ultrapure gases in the semiconductor industry. It is the first transducer to use the SDP 5003.2080 and offers maximum security of investment. Due to minimal signal noise, the sensor provides precise measured values in the long term. Thanks to active temperature compensation, even with high temperature fluctuations. Measured values can be viewed on the display.

Special features

  • Highest process safety through file over EtherCAT ®
  • Expanded spectrum of features
  • Scalable quantities and individual adaptations for OEM applications
  • Maximum plant safety through cable redundancy
Identification
ModelWUD-20-E
Product familyWUD
SubcategoryTransducer
Measuring range
Pressure ranges0…30 psi · 0…60 psi · 0…100 psi · 0…2 bar · 0…4 bar · 0…7 bar · 0…2000 psi · 0…3000 psi · 0…5000 psi · -1…1 bar · -1…3 bar · -1…6 bar · -14.5…14.5 psi · -14.5…30 psi · -14.5…45 psi · -14.5…1000 psi · -14.5…2000 psi · -14.5…3000 psi · 0…160 bar · 0…0.2 MPa · 0…0.4 MPa · 0…0.7 MPa · 0…250 bar · 0…400 bar · -1…70 bar · -1…100 bar · -1…250 bar · 0…300 psi · 0…500 psi · 0…1000 psi
Accuracy
Accuracy class0.3 % of span
Accuracy standardIEC 62828-1
Process conditions
Process connection
¼" swivel union nut¼" male swivel nut¼" weld stub¼" T-connector¼" fixed male nutMSMC-seal 1 ⅛"MSMW-seal 1 ⅛"MSMC-seal 1 ½"MSMW-seal 1 ½"1/4" swivel union nut1/4" male swivel nut1/4" weld stub1/4" T-connector
Process temperature−20…+100 °C
Electrical characteristics
Output signalEtherCAT · EtherCAT®
Power supplyDC 10 … 30 V
Electrical connectionCircular connector M8 x 1 (3-pin) per DIN EN 61076-2-104, Ethernet CAT5e RJ45, shield connected
Materials
Case materialStainless steel 1.4301 (304)
Wetted parts materialStainless steel 1.4404 (316L), 2.4711 / UNS R30003, Stainless steel 1.4404 (316L) VIM/VAR Electropolished, Stainless steel 1.4404 (316L) VIM/VAR
Sealing materialElectropolished per SEMI F19
Operating environment
Ambient temperature−10…+60 °C
IP ratingIP20
Weight0.125 kg
Certifications and approvals
Certifications
RoHSCEPressure Equipment DirectiveEMC Directive EN 61326
Additional details
Datasheet languagesEN, DE
Tables from datasheet
Accuracy specifications
Non-linearity per BFSL per IEC 62828-1≤ 0.1 %of span (≤ 0.15 %of span with measuring range 2 bar [29 psi])
Accuracy→ See 'Max. measured error per IEC 62828-1'
Max. measured error per IEC 62828-1≤ 0.3 %of span (≤ 0.6 %of span with measuring range 2 bar [29 psi])
Accuracy of the digital display1 %of span ±1 digit
Zero point error≤ 0.25 %of span
Zero point setting±3.5 %of span
Signal noise≤ ±0.06 %of span
Non-repeatability per IEC 62828-1≤ 0.12 %of span
Influence of auxiliary power0.1 %/10V
Total probable error per IEC 62828-20.5 %of span at -10 ...+60 °C [14 ...+140 °F]
Mean temperature coefficient
Zero point≤ 0.1 %of span/10K
Span≤ 0.15 %of span/10K
Long-term stability per IEC 62828-1≤ 0.25 %of span/year (≤ 0.4 %of span/year with measuring range 2 bar [29 psi])
Resolution0.01 %of span
Reference conditionsPer IEC 62828-1
bar
0…20 …160
0…40 …250
0…70 ... 400
bar
0…20…25
0…40…40
0…70 ... 60
bar
-1 ...+1-1 ...+70
-1 ...+3-1 ...+100
-1 ...+6-1 ...+250
View all (17)
psi
0 ... 300 ... 2,000
0 ... 600 ... 3,000
0 ... 1000 ... 5,000
psi 0 ... 300 ... 300
0 ... 500
0 ... 600 ... 1,000
0 ... 100
psi
-14.5 …+14.5-14.5 …+1,000
-14.5 …+30-14.5 …+2,000
-14.5 …+45-14.5 …+3,000
Further details on: measuring ranges
Units■ bar ■ psi ■ MPa ■ Torr
Maximum working pressure→ Corresponds to the upper measuring range value / measuring range full scale value → Any permanent operation above the maximum working pressure is not permis - sible.
Overpressure limit per IEC 62828-2The overpressure limit is based on the measuring range. Depending on the select - ed process connection and the seal, restrictions in overpressure limit can result. 2 times (4 times for measuring range 2 bar [29 psi])
Vacuum resistanceYes
Process connection
ModelThread sizeMax. measuring range
Model WUD-20-E¼" swivel union nut400 bar [5,000 psi]
¼" male swivel nut
¼" weld stub20 bar [300 psi]
¼" T-connector
Model WUD-25-E¼" fixed male nut400 bar [5,000 psi]
¼" swivel union nut
¼" weld stub
Model WUD-26-EMSMC-seal 1 ⅛"50 bar [500 psi]
MSMW-seal 1 ⅛"
MSMC-seal 1 ½"
MSMW-seal 1 ½"
Output signal
Signal type
EtherCAT ®SDP 5003.2080
Transmission rate100 ms
Monitoring functionSensor failure, electronics failure
Voltage supply
Auxiliary powerDC10…30V
Power consumption<2W
Dynamic behaviour
Settling time per IEC 62828-1< 300 ms
Switch-on time< 30 sec.
Electrical connection
Connection type■ Circular connector M8 x 1 (3-pin) per DIN EN 61076-2-104 ■ Ethernet CAT5e RJ45, shield connected
Pin assignment→ See &#x27;Pin assignment&#x27;
Ingress protection (IP code) per IEC 60529 1)IP20
Reverse polarity protectionU+ vs. U-
Insulation voltageDC 500V
Material
Material (wetted)
Process connectionMaterial■ Stainless steel 1.4404 (316L) per SEMI F20 ■ Stainless steel 1.4404 (316L) VIM/VAR
Surface treatmentElectropolished per SEMI F19
Thin-film sensor2.4711 / UNS R30003
Material (in contact with the environment)
CaseStainless steel 1.4301 (304)
Display headPA12
Surface roughness Ra
Typical≤ 0.13 µm (RA 5)
Maximum≤ 0.18 µm (RA 7)
Operating conditions
Medium temperature limit-20 ...+100 °C [-4 ...+212 °F]
Ambient temperature limit-10 …+60 °C [14 ...140 °F]
Storage temperature limit-10 …+60 °C [14 ...140 °F]
Humidity0 ... 85 %relative humidity (non-condensing)
Helium leak test< 1 x 10 -9 mbar l/sec (atm STD cc/sec) per SEMI F1
Vibration resistance per IEC 60068-2-67.5 mmor 2g for 1 ... 200 Hz / 5g for 200 ... 500 Hz
Shock resistance per IEC 60068-2-2715g for a duration of 11 ms / 30g for a duration of 6 ms
Operating altitude≤ 2,000 m[6.561 ft] above sea level
Ingress protection (IP code) per IEC 60529→ See &#x27;Electrical connection&#x27;
Pollution degree2
Overvoltage categoryI
Packaging and instrument labelling
Packaging■ Double packaging per SEMI E49.6 ■ Individual packaging
Assembly and packaging locationClean room class 5 per ISO 14644
Instrument labellingWIKA product label, glued
LogoDescriptionRegion
EU declaration of conformityEuropean Union
EMCDirective EN 61326 emission (group 1, class B) and immunity (industrial environments)
Pressure Equipment Directive
RoHS directive
LogoDescription
-MTTF: > 100 years
-China RoHS directive
-EtherCAT ® certificate of conformity
Description
Test report■ 3 measuring points ■ Maximum total error ■ Helium leakage rate