Mini diaphragm pressure gauge
Description
The mini diaphragm gauge was developed for high purity applications with limited space requirements, such as smaller integrated gas stick and gas box assemblies.
The nominal sizes of 1" and 1.3" are ideal for applications involving gaseous, liquid and corrosive media up to 160 psi.
The mini diaphragm gauge is helium leak tested and the internals are electropolished to optimally meet purity standards.
Fig. left: Model 432.10, nominal size 1 " Fig. right: Model 432.15, nominal size 1.3 "
With such UHP characteristics, the mini diaphragm gauge is suitable for the semiconductor and flat panel industries, various gas distribution systems, as well as medical gas applications.
The mini diaphragm gauge complies with SEMATECH and SEMI standards to optimally ensure the quality your applications demand.
Special features
- Mechanical pressure gauge with diaphragm element
- Compact design for minimal dead volume and reduced particle generation and entrapment
- Helium leak tested, leak rate ≤ 10 -9 mbar · l/s
- Electropolished wetted parts, surfaces with Ra < 0.25 μm [Ra < 10 μin] for diaphragm element and measuring chamber
- Process connector components from electropolished 316L with metal sealing disc, orbital welded to measuring chamber
| Version | Diaphragm pressure gauge |
|---|---|
| Nominal size (NS) | 1.0" (25.4 mm) for model 432.10 1.3" (33 mm) for model 432.15 |
| Accuracy class | Grade C per ASME B40.1 |
| Scale range | ■ -30 inHg ...+60 psi ■ -30 inHg ...+130 psi ■ -30 inHg ...+160 psi ■ 0 ... 160 psi or all other equivalent vacuum or combined pressure and vacuum ranges |
| Pressure limitation | Steady: Full scale value Fluctuating: 0.9 x full scale value Short time: 1.3 x full scale value |
| Permissible temperature range | |
| Medium | ≤ 140 °F (≤ 60 °C) |
| Ingress protection | IP54 per IEC/EN 60529 |
| Process connection | 1/4 fixed male face seal 9/16-18 UNF |
| Pressure element | Inconel ® 718 |
| Dial | Aluminium, white Black lettering |
| Case | Stainless steel 316L |
| Pointer | Aluminium, black |
| Window | PMMA |
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