WIKA · Pressure measurement · Family WUC
Ultra high purity transducer
Increased safety (Ex ec), intrinsic safety (Ex ic)
Range
0…400 bar
Output
4-20mA · 0-5V
Accuracy
≤ 0.1 % of span (BFSL) for ranges > 2 bar
Protection
IP67
CERoHSPressure Equipment DirectiveREACHEMC directive EN 61326Ex ec ic IIC T4/T5/T6 Gc X[Ex ec ic IIC T4/T5/T6 Gc X]II 3G Ex ec ic IIC T4/T5/T6 Gc X
Price
On request
Depends on configuration
Description
The models WUC-10, WUC-15 and WUC-16 are particularly compact, ultra high purity transducers for pressure measurement of ultrapure gases in the semiconductor industry, especially for hazardous areas. The wetted parts consist of SEMI F20-compliant, electropolished stainless steel 316L and a special 2.4711/UNS R30003 thin-film sensor. The transducers feature excellent EMC stability and a variety of electrical and process connections. The easy access side potentiometer provides convenient zero point setting. Each individual transducer is checked for leak tightness and accuracy.
Special features
- Secure and fast availability
- Developed for applications in hazardous areas
- Variable: Compact design and many configurations
- Accurate measurement, even with high temperature fluctuations
Identification
| Model | WUC-10 |
| Product family | WUC |
| Subcategory | Transducer |
Measuring range
| Pressure ranges | 0…10 bar · 0…16 bar · 0…2 bar · 0…4 bar · 0…7 bar · 0…25 bar · 0…40 bar · 0…60 bar · 0…100 bar · 0…160 bar · 0…250 bar · 0…400 bar · 0…0.2 MPa · 0…0.4 MPa · 0…0.7 MPa · 0…1 MPa · 0…1.6 MPa · 0…2.5 MPa · 0…4 MPa · 0…6 MPa · 0…10 MPa · 0…16 MPa · 0…25 MPa · 0…40 MPa · 0…30 psi · 0…60 psi · 0…100 psi · 0…160 psi · 0…250 psi · 0…300 psi · 0…500 psi · 0…1000 psi · 0…1500 psi · 0…2000 psi · 0…3000 psi · 0…5000 psi |
Accuracy
| Accuracy class | ≤ 0.1 % of span (BFSL) for ranges > 2 bar, ≤ 0.15 % of span (BFSL) for ranges ≤ 2 bar |
| Accuracy standard | IEC 61298-2 |
Process conditions
| Process connection | ¼" swivel union nut¼" male swivel nut¼" fixed male nut¼” T-connector¼” weld stubMSM C-seal 1 ⅛"MSM W-seal 1 ⅛"MSM C-seal 1 ½"MSM W-seal 1 ½"¼" T-connector¼" weld stub1/4" swivel union nut1/4" male swivel nut1/4" T-connector1/4" weld stub |
| Process temperature | −20…+100 °C |
Electrical characteristics
| Output signal | 4-20mA · 0-5V · 0-10V |
| Power supply | DC 10 ... 30 V |
| Electrical connection | Bayonet connector (4-pin), Circular connector M12 x 1 (4-pin), Cable outlet, Sub-D connector (9-pin), Sub-D HD connector (15-pin) |
Materials
| Case material | Stainless steel 1.4301 (304) |
| Wetted parts material | Stainless steel 1.4404 (316L) VIM/VAR, 2.4711/UNS R30003, Stainless steel 1.4404 (316L) per SEMI F20, Stainless steel 1.4404 (316L) |
Operating environment
| Ambient temperature | −20…+85 °C |
| IP rating | IP67 |
| Weight | 0.1 kg |
Certifications and approvals
| Certifications | CERoHSPressure Equipment DirectiveREACHEMC directive EN 61326 |
| Explosion protection | Ex ec ic IIC T4/T5/T6 Gc X[II 3G Ex ec ic IIC T4/T5/T6 Gc X][Ex ec ic IIC T4/T5/T6 Gc X]- Non-incendive apparatus for use in class I, division 2, groups A,B,C,D- Non-incendive for use in class I, zone 2, group IIC (classified) locationsFM: Non-incendive for use in class I, division 2, groups A,B,C,DFM: Non-incendive for use in class I, zone 2, group IICII 3G Ex ec ic IIC T4/T5/T6 Gc XFM: Class I, Division 2, Groups A,B,C,D; Class I, Zone 2, Group IIC |
Additional details
| Datasheet languages | EN, DE |
Tables from datasheet
Accuracy specifications
| Non-linearity per BFSL per IEC 61298-2 | ||
|---|---|---|
| For measuring ranges > 2 bar | ≤ 0.1 %of span | |
| For measuring ranges ≤ 2 bar | ≤ 0.15 %of span | |
| Accuracy | → See 'Max. measured error' below | |
| Max. measured error | ||
| RSS (root sum squares) | For measuring ranges ≤ 2 bar | ≤ 0.4 %of span |
| For measuring ranges > 2 bar | ≤ 0.2 %of span | |
| Per IEC 61298-2 | For measuring ranges ≤ 2 bar | ≤ 1 %of span |
| For measuring ranges > 2 bar | ≤ 0.5 %of span | |
| Zero point setting | ||
| Current output | -5 ... +3.5 %of span (via potentiometer) | |
| Voltage output | -2 ...+5 %of span (via potentiometer) | |
| Non-repeatability per IEC 61298-2 | ≤ 0.12 %of span | |
| Mean temperature coefficient at -20 ... +80 °C [-4 ... +176 °F] (actively compensated) | ||
| Zero point | ≤ 0.1 %of span/10 K | |
| Span | ≤ 0.15 %of span/10 K | |
| Long-term drift per IEC 61298-2 | ||
| For measuring ranges ≤ 2 bar | ≤ 0.4 %of span | |
| For measuring ranges > 2 bar | ≤ 0.25 %of span, at reference conditions | |
| Reference conditions | Per IEC 61298-1 |
| bar | |
|---|---|
| 0 ... 2 | 0 ... 40 |
| 0 ... 4 | 0 ... 60 |
| 0 ... 7 | 0 ... 100 |
| 0 ... 10 | 0 ... 160 |
| 0 ... 16 | 0 ... 250 |
| 0 ... 25 | 0 ... 400 |
MPa
| 0 ... 0.2 | 0 ... 4 |
|---|---|
| 0 ... 0.4 | 0 ... 6 |
| 0 ... 0.7 | 0 ... 10 |
| 0 ... 1 | 0 ... 16 |
| 0 ... 1.6 | 0 ... 25 |
| 0 ... 2.5 | 0 ... 40 |
bar
| 0 ... 2 | 0 ... 10 |
|---|---|
| 0 ... 4 | 0 ... 16 |
| 0 ... 7 | - |
View all (19)
| psi | |
|---|---|
| 0 ... 30 | 0 ... 500 |
| 0 ... 60 | 0 ... 1,000 |
| 0 ... 100 | 0 ... 1,500 |
| 0 ... 160 | 0 ... 2,000 |
| 0 ... 250 | 0 ... 3,000 |
| 0 ... 300 | 0 ... 5,000 |
psi
| 0 ... 30 | 0 ... 160 |
|---|---|
| 0 ... 60 | 0 ... 250 |
| 0 ... 100 | - |
MPa
| 0 ... 0.2 | 0 ... 1 |
|---|---|
| 0 ... 0.4 | 0 ... 1.6 |
| 0 ... 0.7 | - |
Further details on: Measuring range
| Units | ■ bar ■ psi ■ MPa |
|---|---|
| Maximum working pressure | Corresponds to the upper measuring range value/measuring range full scale value |
| Overpressure limit | The overpressure limit is based on the measuring range. Depending on the selected pro- cess connection and the seal, restrictions in overpressure limit can result. |
| Process connection | ||
|---|---|---|
| Model Model WUC-10 | Thread size ¼" swivel union nut | Max. measuring 400 bar [6.000 psi] |
| ¼" male swivel nut | ||
| ¼'T-connector | ||
| ¼' weld stub | 20 bar [300 psi] | |
| Model WUC-15 | ¼" fixed male nut | 400 bar [6,000 psi] |
| ¼" swivel union nut | ||
| ¼" weld stub | ||
| Model WUC-16 | MSMC-seal 1 ⅛" | 50 bar [750 psi] |
| MSMW-seal 1 ⅛" | ||
| MSMC-seal 1 ½" | ||
| MSMW-seal 1 ½" |
Output signal
| Signal type | ||
|---|---|---|
| Current (2-wire) | 4 ...20mA | |
| Voltage (3-wire) | ■ DC 0 ...5V ■ DC 0 ...10V | |
| Load | ||
| Output signal 4 ...20mA | ≤ (auxiliary power - 10 V) / 0.02 A | |
| Output signal DC 0 ...5V | > 5 kΩ | |
| Output signal DC 0 ...10V | > 10 kΩ | |
| Voltage supply | ||
| Auxiliary power | Output signal DC 0 ...5V / 4 ...20mA | DC 10 ...30V |
| Output signal DC 0 ...10V | DC 14 ...30V | |
| Power P max | 1W | |
| Dynamic behaviour | ||
| Rise time (10 ... 90 %) | ≤ 300 ms |
Electrical connection
| Connection type | IP code ¹⁾ | Wire cross-section | Cable diameter | Cable length |
|---|---|---|---|---|
| Bayonet connector (4-pin) | IP67 | - | - | - |
| Circular connector M12 x 1 (4-pin) | IP67 (NEMA 4) | - | - | - |
| Cable outlet | IP67 (NEMA 4) | 0.22 mm² (AWG 24) | 4.8 mm[0.19 in] | ■ 1.5 m[5 ft] ■ 3 m[10 ft] ■ 12 m[40 ft] |
| Sub-D connector (9-pin) | IP54 | - | - | - |
| Sub-D HD connector (15-pin) | IP54 | - | - | - |
Further details on: Electrical connection
| Connection type | → See table 'Electrical connection' on page 4 |
|---|---|
| Wire cross-section | → See table 'Electrical connection' on page 4 |
| Cable diameter | → See table 'Electrical connection' on page 4 |
| Cable length | → See table 'Electrical connection' on page 4 |
| Pin assignment | → See 'Pin assignment' on page 4 |
| Ingress protection (IP code) per IEC 60529 | → See table 'Electrical connection' on page 4 |
| Short-circuit resistance | S+ vs. U- |
| Reverse polarity protection | U+ vs. U- |
| Insulation voltage | DC 500V |
Circular connector M12 x 1 (4-pin)
| 2-wire | 3-wire | ||
|---|---|---|---|
| U+ | 1 | 1 | |
| U- | 3 | 3 | |
| S+ | - | 4 |
Material
| Material (wetted) | ||
|---|---|---|
| Process connection | Material | ■ Stainless steel 1.4404 (316L) per SEMI F20 ■ Stainless steel 1.4404 (316L) VIM/VAR |
| Surface treatment | Electropolished per SEMI F19 | |
| Thin-film sensor | 2.4711/UNS R30003 | |
| Material (in contact with the environment) | ||
| Case | Stainless steel 1.4301 (304) | |
| Surface roughness Ra | ||
| Typical | ≤ 0.13 µm (RA 5) | |
| Maximum | ≤ 0.18 µm (RA 7) |
Operating conditions
| Permissible temperature ranges | Non-Ex | T4 | T5 | T6 |
|---|---|---|---|---|
| Medium temperature limit | -20 ...+100 °C [-4 ...+212 °F] | -20 ...+85 °C [-4 ...+185 °F] | -20 ...+60 °C [-4 ...+140 °F] | -20 ...+40 °C [-4 ...+104 °F] |
| Ambient temperature limit | -20 ...+85 °C [-4 ...+185 °F] | -20 ...+85 °C [-4 ...+185 °F] | -20 ...+60 °C [-4 ...+140 °F] | -20 ...+40 °C [-4 ...+104 °F] |
| Storage temperature limit | -40 ...+100 °C [-40 ...+212 °F] | -20 ...+85 °C [-4 ...+185 °F] | -20 ...+85 °C [-4 ...+185 °F] | -20 ...+85 °C [-4 ...+185 °F] |
Further details on: Operating conditions
| Permissible media | Speciality gases, Vapours, Liquids |
|---|---|
| Helium leak test | < 1 x 10 -9 mbar l/sec (atm STD cc/sec) per SEMI F1 |
| Pollution degree | 2 |
| Vibration resistance per IEC 60068-2-6 | 0.35 mm(10 ... 58 Hz) / 5g (58.1 ... 2,000 Hz) |
| Shock resistance per IEC 60068-2-27 | 500g (1.5 ms) |
| Ingress protection (IP code) per IEC 60529 | → See 'Electrical connection' |
Packaging and instrument labelling
| Packaging | Double packaging per SEMI E49.6 |
|---|---|
| Assembly and packaging location | Clean room class 5 per ISO 14644 |
| Instrument labelling | WIKA product label, glued |
| Logo | Description | Country |
|---|---|---|
| EU declaration of conformity 61326 emission (group 1, class B) and immunity (industrial environments) Pressure Equipment Directive | European Union | |
| EMCdirective EN | ||
| IECEx (option) Hazardous areas - Ex zone 2 (gas) [Ex ec ic IIC T4/T5/T6 Gc X] FM (option) Hazardous areas Non-incendive apparatus for use in class I, division 2, groups A,B,C,D | International | |
| - - Non-incendive for use in class I, zone 2, group IIC (classified) locations | USA |
Description
| MTBF | > 100 years |
|---|
Industry
Energy
Semiconductor, display and photovoltaic industry
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