# Трансмітер надвисокої чистоти — WUD-2X-E > Ультрависокочистий перетворювач із дисплеєм та EtherCAT для вимірювання тиску з високою точністю в напівпровідниковій промисловості - Код каталогу: wud_2x_e - Модель: WUD-2X-E - Категорія: Вимірювання тиску › Pressure sensors - Сторінка товару: https://avigan.com.ua/wika/uk/products/wud_2x_e - Ціна: за запитом - Постачальник: AVIGAN (ТОВ «ВІКА Прилад»), офіційний партнер WIKA в Україні ## Опис Модель WUD-2x-E — це особливо компактний, ультрачистий перетворювач для вимірювання тиску надвисокої точності надчистих газів у напівпровідниковій ... ## Застосування - Semiconductor, display and photovoltaic industry - Ultrapure gas supply in semiconductor production systems ## Особливості - Highest process safety through file over EtherCAT ® - Expanded spectrum of features - Scalable quantities and individual adaptations for OEM applications - Maximum plant safety through cable redundancy ## Технічні характеристики | Параметр | Значення | |---|---| | model | WUD-20-E | | product family | WUD | | short description | Ultra high purity transducer with display and EtherCAT for high-accuracy pressure measurement in semiconductor industry | | subcategory | Transducer | | certifications | RoHS; CE; Pressure Equipment Directive; EMC Directive EN 61326 | | ambient temp | -10 … 60 °C | | ip rating | IP20 | | weight kg | 0.125 | | languages in datasheet | en; de | | pressure ranges | 0 … 30 psi; 0 … 60 psi; 0 … 100 psi; 0 … 2 bar; 0 … 4 bar; 0 … 7 bar; 0 … 2000 psi; 0 … 3000 psi; 0 … 5000 psi; -1 … 1 bar; -1 … 3 bar; -1 … 6 bar; -14.5 … 14.5 psi; -14.5 … 30 psi; -14.5 … 45 psi; -14.5 … 1000 psi; -14.5 … 2000 psi; -14.5 … 3000 psi; 0 … 160 bar; 0 … 160 psi; 0 … 250 psi; 0 … 400 psi; 0 … 0.2 MPa; 0 … 0.4 MPa; 0 … 0.7 MPa; 0 … 250 bar; 0 … 400 bar; 0 … 2 psi; 0 … 4 psi; 0 … 7 psi; -1 … 70 bar; -1 … 100 bar; -1 … 250 bar; 0 … 300 psi; 0 … 500 psi; 0 … 1000 psi | | accuracy class | 0.3 % of span | | accuracy standard | IEC 62828-1 | | process connections | ¼" swivel union nut; ¼" male swivel nut; ¼" weld stub; ¼" T-connector; ¼" fixed male nut; MSMC-seal 1 ⅛"; MSMW-seal 1 ⅛"; MSMC-seal 1 ½"; MSMW-seal 1 ½"; 1/4" swivel union nut; 1/4" male swivel nut; 1/4" weld stub; 1/4" T-connector | | case material | Stainless steel 1.4301 (304) | | wetted parts material | Stainless steel 1.4404 (316L); 2.4711 / UNS R30003; Stainless steel 1.4404 (316L) VIM/VAR Electropolished; Stainless steel 1.4404 (316L) VIM/VAR | | sealing material | Electropolished per SEMI F19 | | process temp | -20 … 100 °C | | output signal | EtherCAT; EtherCAT® | | power supply | DC 10 … 30 V | | electrical connection | Circular connector M8 x 1 (3-pin) per DIN EN 61076-2-104, Ethernet CAT5e RJ45, shield connected | ## Таблиці з даташита ### Accuracy specifications | Non-linearity per BFSL per IEC 62828-1 | ≤ 0.1 %of span (≤ 0.15 %of span with measuring range 2 bar [29 psi]) | |---|---| | Accuracy | → See 'Max. measured error per IEC 62828-1' | | Max. measured error per IEC 62828-1 | ≤ 0.3 %of span (≤ 0.6 %of span with measuring range 2 bar [29 psi]) | | Accuracy of the digital display | 1 %of span ±1 digit | | Zero point error | ≤ 0.25 %of span | | Zero point setting | ±3.5 %of span | | Signal noise | ≤ ±0.06 %of span | | Non-repeatability per IEC 62828-1 | ≤ 0.12 %of span | | Influence of auxiliary power | 0.1 %/10V | | Total probable error per IEC 62828-2 | 0.5 %of span at -10 ...+60 °C [14 ...+140 °F] | | Mean temperature coefficient | | | Zero point | ≤ 0.1 %of span/10K | | Span | ≤ 0.15 %of span/10K | | Long-term stability per IEC 62828-1 | ≤ 0.25 %of span/year (≤ 0.4 %of span/year with measuring range 2 bar [29 psi]) | | Resolution | 0.01 %of span | | Reference conditions | Per IEC 62828-1 | ### bar | 0…2 | 0 …160 | |---|---| | 0…4 | 0 …250 | | 0…7 | 0 ... 400 | | bar | 2 | |---|---| | 0…2 | 0…25 | | 0…4 | 0…40 | | 0…7 | 0 ... 60 | | bar | 2 | |---|---| | -1 ...+1 | -1 ...+70 | | -1 ...+3 | -1 ...+100 | | -1 ...+6 | -1 ...+250 | ### psi | 0 ... 30 | 0 ... 2,000 | |---|---| | 0 ... 60 | 0 ... 3,000 | | 0 ... 100 | 0 ... 5,000 | | psi 0 ... 30 | 0 ... 300 | |---|---| | | 0 ... 500 | | 0 ... 60 | 0 ... 1,000 | | 0 ... 100 | | | psi | 2 | |---|---| | -14.5 …+14.5 | -14.5 …+1,000 | | -14.5 …+30 | -14.5 …+2,000 | | -14.5 …+45 | -14.5 …+3,000 | | Further details on: measuring ranges | 2 | |---|---| | Units | ■ bar ■ psi ■ MPa ■ Torr | | Maximum working pressure | → Corresponds to the upper measuring range value / measuring range full scale value → Any permanent operation above the maximum working pressure is not permis - sible. | | Overpressure limit per IEC 62828-2 | The overpressure limit is based on the measuring range. Depending on the select - ed process connection and the seal, restrictions in overpressure limit can result. 2 times (4 times for measuring range 2 bar [29 psi]) | | Vacuum resistance | Yes | ### Process connection | Model | Thread size | Max. measuring range | |---|---|---| | Model WUD-20-E | ¼" swivel union nut | 400 bar [5,000 psi] | | ¼" male swivel nut | | | | ¼" weld stub | 20 bar [300 psi] | | | ¼" T-connector | | | | Model WUD-25-E | ¼" fixed male nut | 400 bar [5,000 psi] | | ¼" swivel union nut | | | | ¼" weld stub | | | | Model WUD-26-E | MSMC-seal 1 ⅛" | 50 bar [500 psi] | | MSMW-seal 1 ⅛" | | | | MSMC-seal 1 ½" | | | | MSMW-seal 1 ½" | | | ### Output signal | Signal type | 2 | |---|---| | EtherCAT ® | SDP 5003.2080 | | Transmission rate | 100 ms | | Monitoring function | Sensor failure, electronics failure | | Voltage supply | | | Auxiliary power | DC10…30V | | Power consumption | <2W | | Dynamic behaviour | | | Settling time per IEC 62828-1 | < 300 ms | | Switch-on time | < 30 sec. | ### Electrical connection | Connection type | ■ Circular connector M8 x 1 (3-pin) per DIN EN 61076-2-104 ■ Ethernet CAT5e RJ45, shield connected | |---|---| | Pin assignment | → See 'Pin assignment' | | Ingress protection (IP code) per IEC 60529 1) | IP20 | | Reverse polarity protection | U+ vs. U- | | Insulation voltage | DC 500V | ### Material | 1 | 2 | 3 | |---|---|---| | Material (wetted) | | | | Process connection | Material | ■ Stainless steel 1.4404 (316L) per SEMI F20 ■ Stainless steel 1.4404 (316L) VIM/VAR | | | Surface treatment | Electropolished per SEMI F19 | | Thin-film sensor | 2.4711 / UNS R30003 | | | Material (in contact with the environment) | | | | Case | Stainless steel 1.4301 (304) | | | Display head | PA12 | | | Surface roughness Ra | | | | Typical | ≤ 0.13 µm (RA 5) | | | Maximum | ≤ 0.18 µm (RA 7) | | | Operating conditions | 2 | |---|---| | Medium temperature limit | -20 ...+100 °C [-4 ...+212 °F] | | Ambient temperature limit | -10 …+60 °C [14 ...140 °F] | | Storage temperature limit | -10 …+60 °C [14 ...140 °F] | | Humidity | 0 ... 85 %relative humidity (non-condensing) | | Helium leak test | < 1 x 10 -9 mbar l/sec (atm STD cc/sec) per SEMI F1 | | Vibration resistance per IEC 60068-2-6 | 7.5 mmor 2g for 1 ... 200 Hz / 5g for 200 ... 500 Hz | | Shock resistance per IEC 60068-2-27 | 15g for a duration of 11 ms / 30g for a duration of 6 ms | | Operating altitude | ≤ 2,000 m[6.561 ft] above sea level | | Ingress protection (IP code) per IEC 60529 | → See 'Electrical connection' | | Pollution degree | 2 | | Overvoltage category | I | ### Packaging and instrument labelling | Packaging | ■ Double packaging per SEMI E49.6 ■ Individual packaging | |---|---| | Assembly and packaging location | Clean room class 5 per ISO 14644 | | Instrument labelling | WIKA product label, glued | | Logo | Description | Region | |---|---|---| | | EU declaration of conformity | European Union | | | EMCDirective EN 61326 emission (group 1, class B) and immunity (industrial environments) | | | | Pressure Equipment Directive | | | | RoHS directive | | | Logo | Description | |---|---| | - | MTTF: > 100 years | | - | China RoHS directive | | - | EtherCAT ® certificate of conformity | ### Description | Test report | ■ 3 measuring points ■ Maximum total error ■ Helium leakage rate | |---|---| ## Документація - [ds_pe8712_en_co_6cc3aa](https://avigan.com.ua/wika/docs/wika/ds_pe8712_en_co.pdf) — PDF, 1315 KB, en ## Конфігуратор Товар має інтерактивний конфігуратор на сторінці товару. ``` WUD-2 -E- - - -E1A9-1ES-ZZZ ```