# Преобразователь сверхвысокой чистоты — WUD-20

> С интегрированным дисплеем и опциональными контактами переключателя

- Код каталога: wud_20_wud_25_wud_26
- Модель: WUD-20
- Категория: Измерение давления › Pressure sensors
- Страница товара: https://avigan.com.ua/wika/ru/products/wud_20_wud_25_wud_26
- Цена: по запросу
- Поставщик: AVIGAN (ООО «ВИКА Прилад»), официальный партнёр WIKA в Украине

## Описание

Надёжные ультрачистые преобразователи серии WUD-2x сочетают современные концепции преобразователей с аналоговыми выходными сигналами. Таким образом, самые безопасные и ...

## Применение

- Semiconductor, flat panel display and photovoltaic industry
- Ultrapure gas supply in semiconductor production systems

## Особенности

- High-accuracy pressure measurement 0.15 % RSS
- Excellent long-term stability
- Signal noise cancellation and shielding
- Vacuum-referenced pressure measurement
- Active temperature compensation

## Технические характеристики

| Параметр | Значение |
|---|---|
| model | WUD-20 |
| product family | WUD-2x |
| short description | Ultra high purity transducer with integrated display and optional switch contacts for semiconductor, flat panel display and photovoltaic industry applications. |
| subcategory | Transducer |
| certifications | CE; RoHS; FM |
| explosion protection | FM Hazardous areas; FM APPROVED for Hazardous areas |
| ambient temp | -10 … 60 °C |
| ip rating | IP67 |
| weight kg | 0.2 |
| languages in datasheet | en; de |
| pressure ranges | 0 … 2 bar; 0 … 60 bar; -1 … 1 bar; -1 … 250 bar; 0 … 4 bar; 0 … 7 bar; 0 … 17 bar; 0 … 25 bar; 0 … 36 bar; 0 … 70 bar; 0 … 100 bar; 0 … 145 bar; 0 … 225 bar; 0 … 360 bar; 0 … 11 bar; 0 … 30 psi; 0 … 60 psi; 0 … 100 psi; 0 … 160 psi; 0 … 250 psi; 0 … 350 psi; 0 … 500 psi; 0 … 1000 psi; 0 … 1500 psi; 0 … 2000 psi; 0 … 3000 psi; 0 … 5000 psi; 2 … 360 bar; 30 … 5000 psi |
| accuracy class | 0.15 % RSS |
| accuracy standard | IEC 61298-2 |
| process connections | 1/4" weld stub; 1/4" pressure screw, rotatable; 1/4" T-connector, weld stub; 1/4" union nut, rotatable; MSM C 1 1/2"; MSM C 1 1/8"; 1/4" pressure screw, fixed; 1/4" pressure screw, fixed, high flow through; W 21.8-14; VCR; 1/4" NPT |
| case material | 304 SS; AISI 316L; PC/PBT; TPU; PC |
| wetted parts material | 316L stainless steel; 2.4711 / UNS R30003; AISI 316L; 2.4711/UNS R30003 |
| sealing material | PC/PBT; TPE; PC; Metal seal |
| process temp | -20 … 100 °C |
| output signal | 4-20mA; 0-5V; 0-10V; 4-20 mA; 0-5 V; 0-10 V |
| power supply | DC 10 ... 30 V |
| electrical connection | Bayonet connector 4-pin, Circular connector M12 x 1, 15-pin Sub-D HD connector, 9-pin Sub-D connector, Flying leads |
| switching function | Normally open, normally closed, on, off |
| switching contacts | 2 |

## Таблицы из даташита

| Specifications | 2 | 3 | 4 | 5 | 6 | 7 | 8 | 9 | 10 | 11 | 12 | 13 |
|---|---|---|---|---|---|---|---|---|---|---|---|---|
|  | WUD-20, WUD-25, WUD-26 | WUD-20, WUD-25 |  |  |  |  |  |  |  |  |  |  |
| Measuring range | psi | 30 | 60 | 100 | 250 | 350 | 500 | 1,000 | 1,500 | 2,000 | 3,000 | 5,000 |
|  | bar | 2 | 4 | 7 | 17 | 25 | 36 | 70 | 100 | 145 | 225 | 360 |
| Overload safety | psi | 120 | 120 | 210 | 500 | 750 | 1,100 | 2,100 | 3,000 | 4,200 | 6,600 | 10,000 |
| Burst pressure | psi | 1,800 | 1,800 | 2,200 | 4,800 | 6,200 | 7,400 | 8,000 | 10,500 | 10,500 | 10,500 | 10,500 |
|  | Other measuring ranges and units (e. g.MPa, kg/cm²) on request Absolute pressure: 0 ... 2 bar to 0 ... 60 bar Vacuum pressure: -1 ... 1 bar to -1 ... 250 bar |  |  |  |  |  |  |  |  |  |  |  |
| Measuring principle | Metal thin-film sensor |  |  |  |  |  |  |  |  |  |  |  |
|  |  | Materials |  |  |  |  |  |  |  |  |  |  |
| Wetted | Process connection: 316L stainless steel, according to SEMI F20 (option: 316L VIM/VAR) |  |  |  |  |  |  |  |  |  |  |  |
| Case | Lower body: 304 SS Plastic components:PC/PBT Keyboard:TPE Display window:PC |  |  |  |  |  |  |  |  |  |  |  |
| Inboard helium leak test | < 1 x 10 -9 mbar l/sec (atm STD cc/sec) per SEMI F1 |  |  |  |  |  |  |  |  |  |  |  |
| Surface finish | Electropolished, typical Ra ≤ 0.13 µm (RA 5);max.Ra ≤ 0.18 µm (RA 7), per SEMI F19 |  |  |  |  |  |  |  |  |  |  |  |
| Dead volume | WUD-20 < 1.5 cm³ WUD-25 < 1 cm³ WUD-26 < 1 cm³ |  |  |  |  |  |  |  |  |  |  |  |
| Permissible medium | Special gas, vapour, liquid |  |  |  |  |  |  |  |  |  |  |  |
| Power supply U+ | DC 10 ...30V (with output signal 4 ... 20 mAand DC 0 ... 5 V) DC 14 ...30V (with output signal DC 0 ... 10 V) |  |  |  |  |  |  |  |  |  |  |  |
| Output signal and maximum load | 4 ... 20 mA, 3-wire, R A ≤ (U+ - 10 V) / 0.02 A DC 0 ... 5 V, 3-wire, R A > 5 kΩ DC 0 ... 10 V, 3-wire, R A > 10 kΩ |  |  |  |  |  |  |  |  |  |  |  |
| Power P max | 1W |  |  |  |  |  |  |  |  |  |  |  |
| Current consumption | max.50mA |  |  |  |  |  |  |  |  |  |  |  |
| Total current consumption | max. 250 mA(including switching current) |  |  |  |  |  |  |  |  |  |  |  |
| Adjustability of zero point | -3.5 ... +3.5 %of span (via potentiometer) current output signal -2.0 ... +3.5 %of span (via potentiometer) current output signal |  |  |  |  |  |  |  |  |  |  |  |
| Signal response (10 ... 90 %) | ≤ 300 ms |  |  |  |  |  |  |  |  |  |  |  |
| Switch points | Individually adjustable via external control keys |  |  |  |  |  |  |  |  |  |  |  |
| Type | Transistor switching output NPN |  |  |  |  |  |  |  |  |  |  |  |
| Quantity | 1 or 2 |  |  |  |  |  |  |  |  |  |  |  |
| Function | Normally open, normally closed, on, off |  |  |  |  |  |  |  |  |  |  |  |
| Switching current | SP1 / SP2:100mA |  |  |  |  |  |  |  |  |  |  |  |
| Accuracy | ≤ 0.5 %of span |  |  |  |  |  |  |  |  |  |  |  |
| Display |  |  |  |  |  |  |  |  |  |  |  |  |
| Version | 7-segment LED, red, 4-digit, height 8 mm, 270° rotatable |  |  |  |  |  |  |  |  |  |  |  |
| Accuracy | ≤ 1.0 %of span ±1 digit |  |  |  |  |  |  |  |  |  |  |  |
| Update | 0.2 s / 0.5 s / 1 s / 5 s / 10 s / 60 s (adjustable) |  |  |  |  |  |  |  |  |  |  |  |
| Accuracy | ≤ 0.15 %of span (≤ 0.4 with measuring ranges ≤ 2 bar) RSS (root sum squares) ≤ 0.3 1) (≤ 0.6 1) with measuring ranges ≤ 2 bar) |  |  |  |  |  |  |  |  |  |  |  |
| Non-linearity | ≤ 0.1 %of span (≤ 0.15 with measuring ranges ≤ 2 bar) BFSL per IEC 61298-2 |  |  |  |  |  |  |  |  |  |  |  |
| Hysteresis | ≤ 0.14 %of span |  |  |  |  |  |  |  |  |  |  |  |
| Stability per year | ≤ 0.25 %of span (typical) at reference conditions (≤ 0.4 with measuring ranges ≤ 2 bar) |  |  |  |  |  |  |  |  |  |  |  |

### Specifications

| Permissible temperature | 2 |
|---|---|
| Medium | -20 ...+100 °C [-4 ...+212 °F] |
| Ambient | -10 ...+60 °C [14 ...+140 °F] |
| Storage | -10 ...+60 °C [14 ...+140 °F] |
| Rated temperature range (medium) | -20 ...+80 °C [-4 ...+176 °F] (actively compensated) |
| Temperature coefficients in rated temperature range (actively compensated) |  |
| MeanTC of zero | ≤ 0.10 %of span/10 K |
| MeanTC of span | ≤ 0.15 %of span/10 K |
| Assembly and packaging area | Cleanroom class 5 per ISO 14644 |
| Packaging | Double bagging per SEMI E49.6 |
| Shock resistance | 15 g (11 ms), 30 g (6 ms) per IEC 60068-2-27 |
| Vibration resistance | 7.5 mmor 2 g (1 ... 200 Hz) / 5 g (200 ... 500 Hz) per IEC 60068-2-6 |
| Electrical safety | S+ vs. U- |
| Reverse polarity protection | U+ vs. U- |
| Weight | approx. 0.2 kg |

| Logo | Description | Country |
|---|---|---|
|  | EU declaration of conformity ■ EMCdirective EN 61326 emission (group 1, class B) and interference immunity (industrial application) ■ Pressure equipment directive ■ RoHS directive | European Union |
|  | FM Hazardous areas | USA |

## Документация

- [ds_pe8708_en_co_b48f71](https://avigan.com.ua/wika/docs/wika/ds_pe8708_en_co.pdf) — PDF, 740 KB, en